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MBraun OLED Thin Film Deposition - Evaporator
Systems
MBraun's
thin film deposition systems
are engineered for use in university
research, as well as in large-scale industrial
applications. We offer
both standard and custom systems.
Building multi-layer
thin film layers requires pure atmosphere conditions
(<1 ppm of Oxygen and moisture), and that fine
particles are removed quickly, reliably and
continuously. MBraun's
OLED/PLED Thin Film evaporative gloveboxes have been
designed for the deposition of multilayer thin
films; without disturbing intermediate layers caused
by physi, or chemi-sorption.
MBraun's
thin film deposition systems and components are
highly reliable systems that routinely achieve
coating uniformities of <5% in semiconductor
device fabrication applications. Product
configurations range from stand-alone bell jars
to automatic loading systems in gloveboxes for
the coating of wafers (and other applications)
ranging in size from 2" to 300mm.
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Glovebox
Integrated Thin Film Deposition Evaporator
Systems for OLED/PLED |
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MB EVAP
Specifications |
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Glove box integrated
deposition systems include:
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MBraun inert gas glove
boxes
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Multi-source thermal
deposition
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RF or DC sputtering,
E-beam options
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500mm vacuum chamber
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Bell jar options
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Turbomolecular pump
stacks
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Cryogenic pump stacks
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Rate & thickness
monitoring
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Substrate heating,
cooling & rotation
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Source & substrate
shutters
View Data
Sheet
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Request more information |
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Stand Alone
Thin Film Deposition and Evaporator
Components |
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MB Stand Alone Evaporator
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MB EVAP
S/A
Specifications |
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The MB-EVAP S/A vacuum
deposition system is a high quality, stand alone, research &
development tool designed for all of your thin film
requirements. The M.E.S.A. system comes standard as a 2 to 4
resistive source system with the capability to deposit in
sequence or simultaneously and can also be configured to
include RF or DC sputter sources as well as e-beam sources.
Our design incorporates many of the high quality components
used by similar suppliers while still allowing
MBraun to
offer our systems at a cost competitive price.
MBraun can
configure the M.E.S.A. system to meet your exact
requirements in addition to offering a system designed for
easy integration to an MBraun inert atmosphere glovebox
system. Please contact MBraun for more information on this
product.
Options include:
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2 to 4 resistive sources
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RF or DC sputtering
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E-beam sources
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500mm vacuum chamber
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Turbomolecular pump
stacks
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Cryogenic pump stacks
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Rate & thickness
monitoring
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Substrate heating &
cooling
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Substrate rotation
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Source & substrate
shutters
View Data
Sheet
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Request more information |
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Evaporator Module
Click
image for larger picture
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Stainless Steel Bell Jar
Click image for
larger picture
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Evaporator System
Chamber Door
Click image for
larger picture |
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ISO 9001:2000 Certified
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Contact
Information |
Facilities
MBraun USA, 14 Marin Way, Stratham, NH 03885 :: Phone:
603-773-9333, Fax: 603-773-0008, Email:
info@mbraunusa.com
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